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Thermal CVD system for CNT synthesis [MPCVD-70] ----- JPY5,800,000～
Figure of system components
Purpose: A furnace type of CVD system for synthesizing carbon nanotubes with a horizontal quartz tube furnace (diameter = 70 mm).
Features:
・Furnace heating unit and temperature controller are integrated in one unit.
・Ethanol liquid can be used as carbon source, as well as hydrocarbon gas;
good effect for SWCNT synthesis.
・Catalyst-precursor providing function is equipped;
long-length ( ~500 um) vertically-aligned CNT films and powdery CNT can be synthesized.
・3 lines of precise mass-flow gas controllers are equipped.
The use of a quartz reaction tube with a diameter of 70 mm and tube furnace as well as the increased volume of the hot zone makes it possible to produce a large amount of powder CNT (10 gram per batch), and vertically aligned CNT can be grown on a large substrate (up to 65 mm・200 m).
The shape of the furnace is different from that used in MPCVD-50, but the fundamental functions are as the same as those of MPCVD-50
Specifications
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Configuration
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Tubular Furnace
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Operating Temp.
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400～1000℃
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Control of Temperature
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1zone Program Control
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Dimension
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W750㎜×H605㎜×D450㎜
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Electric Capacitance
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AC200V 20A single-phase 50/60Hz
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Furnace Tube
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Material
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Quartz
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Dimension
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OD70㎜×ID65㎜×L1200㎜
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Control of Gases
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Mass Flow Controller
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Introduced Gases
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Carrier Gas：N2 or Ar
Reducing Gas：H2
Hydrocarbon Gas：C2H2 or C2H4 or CH4
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Dimension（Box）
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W250㎜×H310㎜×D450㎜
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Vacuum Gauge
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Bourdon Gauge
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Vacuum Pump
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Oil-sealed Rotary Vacuum Pump
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Dimension
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W156㎜×H200㎜×D300㎜
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Feed Mechanism for Liquid Fuel
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Feed Mechanism for catalyst precursor
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