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HEX vs HEX-L
Within the HEX Series of PVD systems, there are two options: the HEX and the HEX-L. While the core philosophy of modularity remains the same in both systems, there are key differences to consider when deciding which one is right for you.
HEX
Benchtop or rack-mounted compact system |
HEX-L
Larger mobile base-stand-mounted system |
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Customise with Sources
We have a range of deposition sources to customise the HEX and HEX-L, depending on your required applications. If you’re unsure, please contact one of our technical specialists.
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TAU
Our high-accuracy (sub-monolayer) mini E-beam evaporators are ideal for ultra-thin film deposition with reliable process control. Material can be evaporated from rods or materials held in a crucible.
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TES
The single thermal boat source allows for the integration of a range of thermal boats for the deposition of both metals and organics/polymers.
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FISSION
The FISSION source enables RF and DC sputtering functionality. Designed for 2″ diameter targets, the sputter sources are equipped with SmCo magnets and accept targets with thickness ranging from 0.5 to 6mm of non-magnetic materials and up to 1mm for magnetic materials.
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ORCA
The ORCA organic deposition source is designed to operate between 50 and 600 C to allow sensitive organic materials to be evaporated with precise control
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